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Characterization of periodic nano- structures by Spectroscopic Ellipsometry

source:JRS Release time:2018/02/07

Characterization of periodic nano-structures by Spectroscopic Ellipsometry

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Principles of Ellipsometry      Applications of Ellipsometry    About Eoptics

Out line

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Basic Principle of Ellipsometry

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Measurement information of Ellipsometry for thin films

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From Ellipsometry to Scatterometry

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From conventional Ellipsometry to Mueller Matrix Ellipsometry

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